LAM

LAM Parts

LAM

Part Number Description
40-055609-26,-27,-28,-30 ROD,QUARTZ,4MM
413-330504-082 RING FOCUS FLAT 9608
661-097953-001 UV LAMP
713-001585-004 GDP CAP SCREW
713-011574-001 PLUNGER,WAFER CLAMP
713-011577-001 WASHER
713-011585-001 COVER,CLAMP BOLT
713-011585-004 COVER,CLAMP BOLT
713-011928-001 CAP,BOLT,ELECTRODE
713-028485-001 BOLT,ELECTRODE RING
713-028553-103-REV. COMFINEMENT RING CERAMIC
713-048216-001 CLIP,RETAINING.SYM DOOR MNT
713-085131-001 TUBE,TEFLON,.25 OD,LINER,2300
713-182341-007 INSERT,HRVA,IRIS CELL, 11.55,14.5
713-182341-009 INSERT,HRVA,IRIS CELL, 11.60,14.5
713-196778-001 GASKET,SAC MEMBRANE,FUSION
713-198058-002 GASKET,DC MEMBRANE,FUSION
713-238718-002 NOZZLE.TIP,EBR,HD PEM
715-008220-105 DR,PLASMA,BARRIER,BMPR,ROCKER V,PM
715-011535-001 RING,CLAMP-UPPER ELECTRODE
715-011565-001 BOLT,CLAMP RETAINING
715-011565-002 BOLT,CLAMP RETAINING
715-011565-003 BOLT,CLAMP RETAINING
715-011622-101 LFTR,WFR,4-PIN
715-011622-201 LFTR,WFR,4-PIN,ULTEM
715-011622-221 LFTR,WFR,4-PIN,ULTEM
715-011628-001 DIVIDER,FLOW
715-011982-001 CAP,PLUNGER HOUSING,LOWER
715-038611-001 SOCKET,PLASMA SENSOR
715-038611-002 SOCKET,PLASMA SENSOR
715-189682-001 RING,CUP BOTTOM,APC,1MM
715-194712-003 RING,DC,FUSION
715-228142-001 PROBE,POT,3N COBALT,FUSION CELL
715-304201-001 HOLDER,LIFT PIN
715-304202-001 CAP,RETAINER,LIFT PIN HOLDER
716-003543-001 HOT EDGE RING (315ESC)
716-003543-123 REV.F RING, HOT EDGE, SI, DUAL SLOPE 300MM
716-003543-135 REV.E RING, HOT EDGE, SI, DUAL SLOPE 300MM
716-005773-005 FOCUS RING
716-006721-001 INSULATOR RING
716-011057-002 RING FILLER UPPER
716-011427-003 CERAMIC DISK
716-011540-001 UPPER FACE RING
716-011563-063 WAFER CLAMP 6INCH
716-011563-151 UNIVERSAL CLAMP RING
716-011563-161 WAFER CLAMP 6 INCH
716-011565-002 BOILT CLAMP RETAINING
716-011570-001 ORIFICE(PUMP)
716-011638-006 FOCUS RING
716-011651-006 WAFER CLAMP EDGE RING
716-011758-016 EDGE FOCUS RING
716-011830-006 FOCUS RING
716-011923-001 ATTACHMENT RING
716-017544-001 SI HOT EDGE RING
716-018614-081 FOCUS RING 9600 NOTCH
716-020904-018 RING EDGE FOCUS
716-020905-001 FILLER RING
716-023013-004 HOT EDGE RING
716-023013-005 HOT EDGE RING
716-023013-015 HOT EDGE RING
716-023013-027 SI HOT EDGE RING
716-023013-120 HOT EDGE RING
716-028028-004 RING ELECTRODE
716-028123-002 UPPER FILLER RING
716-028721-261 UNIVERSAL CLAMP RING
716-028721-268 CLAMP 6 INCH
716-028721-288 CLAMP RING 4528
716-028725-161 UNIVERSAL CLAMP RING
716-030135-001 EDGE RING 8 NOTCH
716-030136-001 RING EDGE 6" ESC
716-031257-533 EDGE RING
716-031453-001 R FLR LWR CHBR
716-031453-002 LOWER FILLER RING
716-040738-120 HOT EDGE RING FLEX45 (L/P)
716-040738-220 HOT EDGE RING FLEX45 (L/P)
716-040738-413 EDGE RING
716-040738-427 EDGE RING 75
716-040738-432 SI_RING_HOT_EDGE_RING_FLEX_ES_
716-040738-439 EDGE RING(5.5T-45)
716-040738-471 SI HOT EDGE RING(FOR FLEX DX_L/P)
716-043436-021-D SI COUPLING RING
716-044668-001 HOT EDGE RING
716-044668-571 REV.E HOT EDGE RING(TSMC 15)
716-044668-930 HOT EDGE RING(HOLE TYPE)
716-047038-427 SI HOT EDGE RING
716-057993-003 INJ DUAL FACESEAL CER
716-064782-602 LAM FLEX ELECTRODE
716-069688-005 INNER CELL
716-069688-022 SHOWER PLATE
716-069688-022 REV.F ELTD,INR,SI,300MM(TALON INNER)
716-069688-041 REV.E ELCTD, INR, SI, LG R, 300MM, POL
716-069688-058 ELCTD, INR SI 300MM FOR FLEX FSE
716-069688-058 REV.H Pearl Talon Inner UEL
716-069688-058 REV.J Pearl Talon Inner UEL
716-069688-062 REV.D FLEX-FX INNER ELECTORDE
716-069688-076 FLEX-GX/GX_E INNER ELECTRODE
716-069688-082 REV.B ELCTD INR, SI, POLISHED, FLEXFX
716-072567-418(S) EDGE RING(0 degree)
716-072576-415 CER HOT EDGE RING
716-072576-428 SILICON_RING,HE,4XX,ESC,W/FLAT
716-073979-004 SI UPPER ELECTRODE_A_ELCTD,SI,300
716-073979-032 REV.J ELCTD, MONO TALON +, CZ, .18 STE
716-073979-074 MONO TALON CEL
716-073979-136 SILICON(SI)_SILICON ELECTRODE MONO T
716-073979-152 ELCTD, MT PLUS,.CZ,.10 STEP
716-073979-851 Upper Electrode GL
716-074512-002 PIN LIFTER-LOADLOCK
716-077916-001 TALON OUTER
716-081661-803 FLEX FL HOT EDGE RING
716-082039-001 SI ELECTRODE_CORE_OUTER_ELECTRODE
716-087139-013 RING SI COUPLING FLEX-ES ELECTRO
716-087943-913 GX COVER RING
716-087945-020 COOLED EDGE RING
716-087945-020 REV.B RING,EDGE,5XX,CER,296MM,NP 50D,13.6D
716-087945-045 45° COOLED EDGE RING FOR FLEX EX
716-087945-071 REV.C RING, EDGE 5XX 296MM NP 350 13.6D
716-087945-072 COOLED EDGE RING 45˚
716-087945-077 REV.B SI EDGE RING CER(15D)_FLEX FX
716-087945-254 SI EDGE RING 45D_13.3
716-087945-275 REV.B RING,EDGE,5XX,296MM,NP 350,13.0D
716-087945-849 NNYNN 6.86T SI EDGE RING
716-087945-863 FLEX-GX CER HCR
716-087945-868 FLEX GX-CER-HCR (Si)
716-087945-964 C_FLEX GX_CER_HCR_SI
716-089596-020-B FLEX EX INNER CEL
716-089596-027 Si Upper Electrode 0.16Step
716-140068-001 RING FOCUS ESC 6"
716-140118-001 RING FOCUS ESC 8
716-140139-001 HOT EDGE RING
716-140139-008 HOT EDGE RING
716-140139-211 HOT EDGE RING HIGH WALL
716-140139-213 SI FRONT END HOT EDGE
716-140139-311 8"HOT EDGE RING
716-140163-001 HOT EDGE RING
716-230577-268 FLEX HX NARROW COOL EDGE RING
716-250514-001 CLAMP SHADOW
716-330045-001 EDGE RING 9400
716-330045-004 EDGE RING,NOTCHHED
716-330045-281 EDGE RING
716-330045-282 EDGE RING PTX
716-330045-381 R EDGE NON LANDED 8" NOT 96PTX
716-330121-001 WINDOW RF SHAPED FIXED GAP
716-330122-002 TOP PLATE
716-330131-001 TCP CERAMIC DISK
716-330191-082 FOCUS RING
716-330504-061 FOCUS RING
716-330504-064 FOCUS RING
716-330504-082 RING FOCUS FLAT 9608
716-330890-001 BOTTOM SHADOW RING
716-330892-005 PTX GDP
716-330892-007 PTX GDP
716-330892-507 PTX GDP
716-330915-001 CERAMIC INSERT
716-331051-002 BOTTOM SHADOW RING
716-331051-006 BOTTOM SHADOW RING
716-440054-108 RING FOCUS ADAPTER
716-440241-001 RING BOTTOM LWR CHAMBER
716-443086-308(U1) SILICON HOT EDGE RING
716-443086-401 HPT HOT EDGE RING
716-443086-401 REV.B R, H EDGE SI SGL XTAL H WALL 8"
716-443086-405A HPT HOT EDGE RING
716-443086-408 HPT EDGE RING(10L)
716-443086-701 REV A HOT EDGE RING
716-443129-001 RING FOCUS ESC INNER 8"
716-460216-001 FOCUS RING DSQ
716-540198-001 WINDOW
718-094523-261 ASSY ELCTD ESC 6" M3RFLT
718-094523-281 ASSY ELCTD ESC 8" NOTCHED
718-094756-061 ELCTD UPR 6" ESC MJR FLT
718-094756-081 ELCTD CAP GD RING ESC 8" NCH
720-009531-004 SCR,FLH,PCTFE,6-32
720-009531-006 SCR,FLH,PCTFE,6-32
720-009531-008 SCR,FLH,PCTFE,6-32
720-009531-010 SCR,FLH,PCTFE,6-32
720-009531-012 SCR,FLH,PCTFE,6-32
720-009531-014 SCR,FLH,PCTFE,6-32
720-009531-016 SCR,FLH,PCTFE,6-32
720-009531-018 SCR,FLH,PCTFE,6-32
720-009531-020 SCR,FLH,PCTFE,6-32
720-009531-022 SCR,FLH,PCTFE,6-32
720-009531-024 SCR,FLH,PCTFE,6-32
720-009531-026 SCR,FLH,PCTFE,6-32
754-205331-001 CREST-TO CREST WAVE SPRING
754-294795-001 GAP TYPE SPIRAWAVE
799-303598-002 PROBE,NWPK,ERGONOW,CSF504,V4010,4L,CHM B
839-011906-001 ELECTRODE SILICON 6"
839-011907-001 ELECTRODE SILICON 8"
839-011907-100 ELECTRODE SILICON 8"
839-011907-111 ELECTRODE SILICON 8"
839-011907-222 ELECTRODE SILICON 8"
839-011907-334 ELECTRODE SILICON 8"
839-011907-902 ELECTRODE SILICON 8"
839-011907-912 ELECTRODE SILICON 8"
839-011907-913 ELECTRODE SILICON 8"
839-011907-913 8" SI ELECTRODE
839-015480-003 SI ELECTRODE
839-020965-005 (S)ASSY ELCTD OUTER TC 300MM
839-020965-320 REV.E ELECTD, OUTER, .18 STEP, 300MM, CLN
839-021113-002 (S)ASSY ELCTD INNER TC 300MM
839-044157-031 FLEX45 INNER ELECTRODE ASS'Y
839-044157-331 ELECTD, INR, 8-32 OFFSET, CLN
839-086924-045 ASSY,STUD,SOCKET,OE
839-086924-046 ASSY,STUD,SOCKET,C SHROUD
839-086924-050 ASSY,STUD,SOCKET,IE
839-443215-514 ELECTRODE SILICON 8" HPT
839-443215-544 ELECTRODE SILICON 8" HPT
849-086924-021 ASSY,STUD,SOCKET