Products

Ceramic

• Alumina (Al2O3)

• Aluminum Nitride (ALN)

• Silicon Carbide (SiC)

• Yittria (Y2O3)

• Zirconia (ZrO3

SIlicon

• Single Crystal Silicon

• Poly Crystal Silicon

Quartz

• General Quartz

• Synthetic Quartz

Polymide

• Patented Authentic Product

Part Description

• Gas Distribution Plate (GDP)

• Focus Ring

• Edge Ring

• Insulator Ring

Part Description

• Upper Electrode

• Focus Ring

• Insert Ring

• Collar Ring

Part Description

• Shadow Ring

• Edge Ring

• Shield Ring

• WIndow

• Insulator

Part Description

• Screws, Pin, Position Nail

• Pressure Ring, Gasket, Spacer, Pillar

• Insulation Ring, Protective Cover

• Polymide Medium

• Polymide Bushing

• Polymide Seals