TEL

TEL Parts

TEL

Part Number Description
023-002019-1 TS BR940206 8INCH FORK
023-002022-1 UNITY-2 ROBOT FORK
1105-300561-13 TRANSFER FORK 8inch W-F
1110-333183-11 TRANSFER FORK 99.7%
1110-337492-11 TRANSFER FORK 99.9%
1805-220159-13(U) SHIELD RING
1810-121499-12 SHIELTER RING
1810-121499-22 RING, SHELTER 8inch
1810-121758-11 SHELTER RING
1810-121923-11 CEL SILICON 10T CATHODE 8"
1810-121926-12 INSULATOR UPPER-lldx
1810-121926-12 ELECTRODE UPPER(LLDX) - POLISHING
1810-121988-11 ELECTRODE UPPER(LLDX)
1810-150015-11 SI UPPER 320mm OD 681 HOLE(INFINION)
1810-220977-12 CLAMP RING
1810-221043-15 BOTTOM INSULATOR
1810-221439-24 TEL SI 8" CATHODE
1810-221439-25 SI UPPER ELECTRODE(357 HOLE)
1810-221470-25 SI ELECTRODE
1810-221471-24(R2) CRYSTAL CATHODE(F7)
1810-221471-25 UPPER ELECTRODE 8"
1810-222226-11 DEPO SHIELD 2(IPP) H : 255.8
1810-222235-12 BOTTOM RING
1810-224784-14 HOLDER F/R(CE-222)
1810-224789-11 SI ELECTRODE
1810-224852-12 SI ELECTRODE 10T
1810-323880-13 SI INNER FOCUS RING(im)
1810-323880-13M SI INNER FOCUS RING
1810-323880-14 SI FOCUS RING
1810-323881-14 SI FOCUS RING
1810-325485-13 F.R COVER-C
1810-328070-11 BELLOWS RING
1810-328070-11(U) BELLOWS RING
1810-328661-12KN INNER FOCUS RING
1810-328662-12 INNER FOCUS RING
1810-329044-11 INNER FOCUS RING(7.1T-59)
1810-329044-11(U4) RING FOCUS INNER (0.2)
1810-329156-11 RING, FOCUS INNER COOL 235MM SCCM
1810-329157-11 SIDE SUPPORT PLATE
1810-329157-11 INNER FOCUS RING(6.23T->8T)
1810-329157-11(S) INNER FOCUS RING
1810-329157-11(U9) SI INNER FOCUS RING(RUBBER BONDING)
1810-329523-11 LLD INNER FOCUS RING 250MM LLD SCCM
1810-329535-11 M21]SI FOCUS RING(LLDX)
1810-350062-=11 FOCUS RING UP FOR INFINION
1880-027152-12 6" SI ELECTRODE(FOR TE-5000)
1885-322830-4 HANDLING ARM (TE8500)
1D10-302209-15 SI-FOCUS RING(NOTCH)
1D10-302209-20 SI FOCUS RING
1D10-304010-11 RING SHIELD B3(DRM2)
1D10-305530-14 6J-SI-240-3.4(DRM2)
1D10-307164-11 RING INSULATOR A7-3
1D10-307164-11(U4) RING INSULATOR (O-RING)_NLM
1D10-309946-12 SI FOCUS RING
1D10-310020-11(S) DRM FOCUS RING
1D10-310020-11(U) TEL FOCUS RING SI
1D10-310020-11(U5) TEL FOCUS RING(3.1T)
1D10-311372-12 RING, INSULATOR A7 LA4-6(CE)(DRM2)
1D10-311373-12 RING, INSULATOR A7 (CE)(DRM2)
1D10-313199-11 SI FOCUS RING
1D10-313897-12 RING F-8SO-SI-220 2.5(DRM2)
1D10-409458-12 RING-F-SI-260-1.4(DRM2)
1D80-001885-12 CERAMIC ARM
2910-290041-12 8INCH TWEEZER
2910-490457-12 CERAMIC PIN
2L05-450106-11 BLOCK GND-S1 GAP PLUG 2.5
2L10-250520-11 SI_VIGUS PX INNER CEL
2L10-250820-11 CEL,INNER(PH-MG) V2
2L10-251061-21 FOCUS RING,AD360_T4.5(320)_VIGUS
2L10-251061-21M SI_FOCUS RING, AD360_T4.5(320)
2L10-251162-11 VIGUS GROUND RING
2L10-251182-11 VIGUS FOCUS RING
2L10-251342-11 CEL,INNER ST(NEST)V2
2L10-251343-21 CEL, OUTER ST (NEST) V2
2L10-251444-11 SI MASK SPACER RING
2L10-251482-11 SJ-6215-SB
2L10-251514-11 FOCUS RING LAB 360-T4.5-306
2L10-251685-11 RING(L),SI GND STEP BSP V2
2L10-251853-11 RING, F-SI-D380 D297.0-T2.8 S-MF
2L10-252404-11 RING FOCUS T5G50
2L10-252542-21(S) ELECTRODE ( VIGUS 0.5-0.8 HOLE )
2L10-252706-11 SI; FOCUS RING;0823-0400-001
2L10-252779-11 RING FOCUS 310-4.8G50L CONCAVE
2L10-252838-11 RING, FOCUS LAB 320-T5 WIDE AN
2L10-252987-21 INNER CEL_VIGUS MK4
2L10-253065-21(S) FOCUS RING ( VIGUS-5.5T )
2L10-253072-11 RING, F-SI-D380 D297-T2.6 D4.8
2L10-253630-11 ELECTRODE (0.5~0.8 HOLE)
2L10-253631-11 ELECTRODE, FLAT 0.5~0.8H606 V2
2L10-254186-21 FOCUS RING (111,4.3T)
2L10-254262-21 SI GROUND RING
2L10-254267-21 VIGUS FOCUS RING
2L10-254327-21 RING FOCUS ATC-BSP 7.5-55-302
2L10-254608-11 ELECTRODE, FLAT T14 H932
2L10-254608-21(M) RK4 INNER CEL MOD(T=19)
2L10-254649-11 RING,FOCUS 310-T4 WIDE AN
2L10-254951-21 RING FOCUS 320-T5 NO HOLE
2L10-255149-21 FOCUS RING_3.35T RK4 FOCUS RING
2L10-255186-21 RING FOCUS 325-315-T3.6
2L10-255441-21 VIGUS RK4 3.2T FOCUS RING
2L10-255875-21 RING. FOCUS T4 NOMF FRTC
2L10-255879-11 ELECTRODE, INNER DC2
2L10-255880-21(U1) RK4 CEL OUTER(Damper)
2L10-255931-11 ELECTRODE, OUTER ST11.7 DC2
2L10-256131-21 3.25 F/R
2L10-256263-11 ELECTRODE, INNER DC2-15
2L10-256266-11 ELECTRODE, OUTER DC2-15
2L10-256905-11 RING, FOCUS T3.2 TO0
2L10-257632-11 RING, FOCUS T2.35-2.2 NOMF FR28
2L10-257644-21 3.80T FOCUS RING VIGUS MK4
2L10-258303-11 RING, FOCUS T3.4 TO0
2L10-258514-21 RK4 FOCUS RING 3.5T(0.02)
2L10-258650-21 FOCUS RING_SI(3.65T)RK4
2L10-259614-11 RING, MONO-SI T-GND450.5 T11.6
2L10-259677-21 3.15T LARGE DIAMETER FOCUS RING
2L10-259886-11 RING, FOCUS T3.3 TO0
2L10-350932-13 VIGUS SAPPHIRE LIFT PIN
2L10-359931-11 RING, FOCUS 380-DM
2L10-450605-11 RK4 SAPPHIRE WINDOW
2L20-254608-21 CEL T14 FLAT_RK4
3D10-201448-11 SI FOCUS RING(TE 3.4T)
3D10-201448-13 FOCUS RING 360-302-C
3D10-201448-21 FOCUS RING
3D10-202364-12 CEL,INNER(TE-T10-P-LABY)
3D10-202375-12 SILICON CEL,OUTER[TE349-LABY/SINGLE]
3D10-202375-22 CEL, OUTER(TE-349-LABY-GNDFLAT)
3D10-202489-11 FOUCS RING 380-T4.0
3D10-250012-11 CEL,INNER (TE-LABY304)
3D10-250045-11 FOCUS RING, 380-T4.0 301-3PIN
3D10-250195-11 FOCUS RING, 360-305-LT-8.6
3D10-250266-11(S-2) ELECTRODE ( TE )
3D10-250281-11(S) FOCUS RING, J302-303-8.3-298.2
3D10-250306-11 SI FOCUS RING (TE,7.3T)
3D10-250316-11 (SI-SHIN)CEL INNER(SH-OX1.75)
3D10-250317-11 FOCUS RING
3D10-250317-21 OUTER CELL(SHIN/SINGLE)
3D10-250318-11 RING FOCUS 8/MIN/CL(SHIN 3.4T)
3D10-250381-11 FOCUS RING, 380-T4.0(CP)T
3D10-250442-31 FOCUS RING, 380-T4.0
3D10-250755-21_56.5 SHIN FOCUS RING 4.8T_56.5
3D10-250755-21M SHIN COOLING FOCUS RING 360_4.5T(307)
3D10-251097-11 ELECTRODE, OX T10-73-C912 NP
3D10-251406-11 RING, FOCUS 380-T7.0
3D10-290318-11 RING FOCUS 8/MIN/CL(SHIN 3.25T)
3D10-302020-11 CATHODE 12" CEL, OTX, 10-15
3D10-350401-11 SI FOCUS RING(JIN)
3D10-351315-12 INNER CELL
3D87-052882-12 SILICON RING,PROTECTION (TE GND FLAT)
3M10-409091-12 GUIDE LONG PIN WRAP
3M10-409092-11 NUT PIN GUIDE
3M10-451143-11 PIN TAPER WRAP
3M10-451144-12 GUIDE TAPER PIN WRAP
810-321555-4 INSULATOR PIPE