| 0020-20114 |
ISOLATOR DC BIOS |
| 0020-20126 |
STAND OFF CERAMIC DC BIOS |
| 0020-20215 |
HOUSING DOUBLE RF COIL |
| 0020-21664 |
INSULATOR SOURCE 13" |
| 0020-22975 |
INSULATOR 8 WAFER |
| 0020-25854 |
BLADE BUFFER |
| 0020-25917 |
ISOLATOR DC BIAS MODIFIED |
| 0020-28907 |
ISOLATOR DC BIAS MODIFIED |
| 0020-30287 |
ADAPTER RING |
| 0020-31918 |
PLUG DC ESC |
| 0040-39990 |
ESC ASSY 200mm DUAL ZONE SUPER E |
| 0040-40978 |
ESC ASSY 200mm DUAL ZONE E-MAX |
| 020-103780 |
RING SINGLE |
| 0200-00137 |
FOCUS RING DPS |
| 0200-00177 |
SI COLLAR(SUPER-E) |
| 0200-00230 |
DEP RING 8" SNNF CERAMIC |
| 0200-00234 |
ISOLATOR BKM1 ENHANCED TXZ 200MM |
| 0200-00247 |
CAPTURE RING DPS |
| 0200-00250 |
RING CAPTURE C-ESC |
| 0200-00255 |
COVER |
| 0200-00261 |
CHAMBER INSERT |
| 0200-00264 |
RING FOCUS 145MM JMF |
| 0200-00276 |
PIN WAFER GUIDE |
| 0200-00277 |
PLATE GUIDE |
| 0200-00296 |
SLEEVE JUNCTION |
| 0200-00307 |
RING CAPTURE C-ESC |
| 0200-00316 |
LINER MIDDLE |
| 0200-00317 |
LINER BOTTOM |
| 0200-00321 |
DPS FOCUS RING |
| 0200-00353 |
PIN SPACER |
| 0200-00354 |
RING PURGE |
| 0200-00402 |
ISOLATOR TOP |
| 0200-00403 |
ISOLATOR MIDDLE |
| 0200-00404 |
ISOLATOR BOTTOM |
| 0200-00410 |
Uni-Insert Gas Distribution 88 holes Quartz |
| 0200-00417 |
RING INSERT SILICON FLAT 150MM |
| 0200-00454 |
BUSING LIFT PIN |
| 0200-00481 |
BOTTOM LID |
| 0200-00576 |
PIN WEIGHT |
| 0200-00621 |
SHADOW RING CERAMIC |
| 0200-00622 |
OUTER RING |
| 0200-00624 |
PURGE RING |
| 0200-00639 |
SI INSERT RING 200MM NOTCH |
| 0200-00639 REV002 |
INSERT RING SILICON 200MM NOTCH |
| 0200-00681 |
WXZ+ HEATER CERAMIC PURGE RING |
| 0200-00689 |
LID. LINER |
| 0200-00796 |
139MILS LIFT PIN |
| 0200-00852 |
SHADOW RING |
| 0200-00933 |
COVER SCREW CATHODE LINNER |
| 0200-00945 |
CAPTURE RING DPS |
| 0200-00947 |
SILICON COLLOR |
| 0200-00968 |
ISOLATOR |
| 0200-00969 |
POMPING LINER FSG-TEOS |
| 0200-00980 |
SINGLE RING CERAMIC 300MM NOTCH |
| 0200-00991 |
CERAMIC BLADE,HIGH SHOE |
| 0200-01009 |
TOP NOZZLE |
| 0200-01239 |
Si Insert Ring(Modified ID) |
| 0200-01326 |
INSULATOR SOURE ADAPTOR |
| 0200-01336 |
FOCUS RING |
| 0200-01427 |
ISOLATOR |
| 0200-01509 |
SI INSERT RING |
| 0200-01511 |
TOP RING,NM,200MM,OXIDE |
| 0200-01766 |
MANIFOLD |
| 0200-01797 |
SI INSERT RING |
| 0200-01797 REV003 |
INSERT RING, NM, 300MM eMAX |
| 0200-01808 |
FOCUS RING |
| 0200-01820 |
SI INSERT RING |
| 0200-01863 |
COVER MINIMUM CONTACT |
| 0200-01991 |
RING FINGER LIFT |
| 0200-02043 |
OUTER INSULATOR |
| 0200-02160 |
WINDOW |
| 0200-02384 |
SILICON L-SHAPE INSERT RING |
| 0200-02385 |
AMAT INSERT RING |
| 0200-02396 |
LINER CERAMIC MIDDLE |
| 0200-02469 |
MANIFOLD |
| 0200-02575 |
139MILS LIFT PIN |
| 0200-02576 |
BASE RING |
| 0200-02577 |
PLATE FINGER,LIFT RING |
| 0200-02597 |
INSULATOR INTERNAL 300MM |
| 0200-02747 |
LID |
| 0200-02916 |
DEPOSITION RING |
| 0200-02972 |
LINER CERAMIC TOP |
| 0200-03233 |
INSERT RING(15L) |
| 0200-03296 REV003 |
INSERT RING, NM L-SHAPE, FLAT, 200MM E-M |
| 0200-03297 REV002 |
TOP RING, SILICON, INTLK 200MM, E-MAX |
| 0200-03312 |
HOOP LIFT 140 FXD FLOAT 300MM |
| 0200-03313 |
BASE RING |
| 0200-03314 |
LIFT PIN 170 FIXED FLOATING 300MM |
| 0200-03414 |
LINER CERAMIC BOTTOM |
| 0200-03472 |
INSERT RING SI |
| 0200-03555 |
SI INSERT RING(E-MAX/3.5T) |
| 0200-03559 |
SI TOP RING(E-MAX/4.3T) |
| 0200-03736K |
SI INSERT RING(PRO) |
| 0200-04017 |
RING DEPOSITION NARROW OD E/T 300MM |
| 0200-04186 |
RING(TOP COLLER,SI,300MM) |
| 0200-04235 |
ISOLATOR CERAMIC 300MM PRODUCER |
| 0200-04619 |
SINGLE RING |
| 0200-04635 |
LIFT PIN |
| 0200-04862 |
SINGLE RING |
| 0200-04969 |
HUB CENTER DUAL SIDE FEED |
| 0200-04995 |
GAS INJECTOR |
| 0200-05032 |
SI INSERT RING |
| 0200-05032 REV002 |
INSERT RING, NMS, L-SHAPE, 300MM EMAX |
| 0200-05216 |
CERAMIC ESC COVER |
| 0200-05262 |
DEPOSITION RING AL W/ECC DUAL AUTI LIFT 300MM PVD |
| 0200-05263 |
COVER RING CERMAIC AL CHAMBER C2 300MM PVD |
| 0200-05335 |
RING SINGLE 195MM SEMI NOTCH CERAMIC |
| 0200-06073 |
RING DEPOSITION Cu COIL EXTENDED TRENCH 300MM |
| 0200-06616 |
NOZZLE INSERT TGN Y2O3 |
| 0200-08670 |
RL-COLLAR, SINGLE CRYSTAL SI |
| 0200-09035 |
LIFT PIN |
| 0200-09071 |
PIN WAFER LIFT |
| 0200-09072 |
SHIELD 200mm |
| 0200-09075 |
ADAPTOR PUMPING PLATE |
| 0200-09182 |
ADAPTER RING |
| 0200-09185 |
LIFT PIN |
| 0200-09282 |
RING INNER SHADOW |
| 0200-09384 |
PIN WAFER LIFT 6 UNIVERSAL |
| 0200-09559 |
COVER 200mm, 6 HOLE |
| 0200-09567 |
SHIELD 200mm IMO |
| 0200-09572 |
SI COLLAR RING |
| 0200-09612 |
CAP 1/4 TURN RETAINER |
| 0200-09614 |
PIN LIFT |
| 0200-09636 |
PLUG DC |
| 0200-09670 |
CLAMP RING 6 INCH |
| 0200-09696 |
FINGER |
| 0200-09716 |
PIN LIFT HEATER |
| 0200-09723 |
SCREW GUIDE PIN HEATER |
| 0200-09735 |
COVER CLAMP RING |
| 0200-09746 |
CERAMIC RING |
| 0200-09750 |
PLUG DC |
| 0200-09757 |
CLAMP RING 6 INCH |
| 0200-09759 |
SHIELD |
| 0200-09822 |
CLAMP 5INCH |
| 0200-09824 |
SHIELD 5" |
| 0200-09827 |
RING PEDESTAL |
| 0200-09828 |
RING FOCUS |
| 0200-09933 |
PIN LIFT |
| 0200-09974 |
PUMPING RING |
| 0200-09997 |
OUTER SHADOW RING |
| 0200-10027 |
SSGD INNER |
| 0200-10036 |
RING MIDDLE |
| 0200-10040 |
RING OUTER |
| 0200-10074 |
LIFT FINGER |
| 0200-10087 |
SSGD OUTER |
| 0200-10111 |
LIFT PIN |
| 0200-10143 |
CHAMBER INSERT |
| 0200-10144 |
ISOLATOR |
| 0200-10157 |
JUNCTION LINER |
| 0200-10158 |
SLEEVE JUNCTION |
| 0200-10160 |
CERAMIC LINER |
| 0200-10163 |
PUMPING LID ISOLATOR |
| 0200-10164 |
PUMPING INSERT |
| 0200-10169 |
EDGE RING |
| 0200-10191 |
SHIELD |
| 0200-10194 |
SHIELD TAPERED |
| 0200-10208 |
INNER RING |
| 0200-10209 |
OUTER RING |
| 0200-10246 |
Uni-Insert Gas Distribution 88 holes Quartz |
| 0200-10263 |
WASHER INSULATING |
| 0200-10284 |
LIFT PIN |
| 0200-10377 |
RING SINGLE |
| 0200-10446 |
Si INSERT RING 200MM NOTCH |
| 0200-10526 |
PUMPING RING |
| 0200-10650 |
CERAMIC PUMPING CHANNEL |
| 0200-12817 REV004 |
INSERT RING, EMAX 3.4T |
| 0200-14210 |
INSERT RING_SINGLE CRYSTAL SI 1.5MM |
| 0200-17989 |
LID WIDE,23.5DIA,C3 |
| 0200-18053 |
LIFT GUIDE PIN LIFT |
| 0200-18077 |
COVER |
| 0200-18078 |
ESC CERAMIC COLAR SHORT |
| 0200-18081 |
COVER ULTIMA |
| 0200-18091 |
COLLAR |
| 0200-18095 |
COLLAR |
| 0200-18108 |
COLLAR MIN CONTACT 200mm |
| 0200-18109 |
COLLAR |
| 0200-20114 |
ISOLATOR DC BIOS |
| 0200-20169 |
RIGID COIL SUPPORT |
| 0200-20170 |
CAP, RIGID COIL SUPPORT |
| 0200-20175 |
COIL SUPPORT |
| 0200-20208 |
LABYRINTH FEEDTHRU COIL SUPPORT |
| 0200-20210 |
COVER DOUBLE RF CONNECTOR |
| 0200-20215 |
HOUSING DOUBLE RF CONNECTOR |
| 0200-20216 |
PIN COVER RF SCREW |
| 0200-20217 |
FEEDTHRU COIL SUPPORT |
| 0200-20285 |
PEDESTAL COVER 8INCH |
| 0200-20315 |
REST BUTTON,VECTRA |
| 0200-20331 |
LOWER COVER RING |
| 0200-20437 |
DEPOSITION RING |
| 0200-30287 |
ADAPTER RING |
| 0200-35290 |
GAS NOZZLE OUTER |
| 0200-35291 |
GAS NOZZLE INNER |
| 0200-35295 |
GAS NOZZLE OUTER |
| 0200-35296 |
GAS NOZZLE INNER |
| 0200-35320 |
FOCUS RING |
| 0200-35323-C |
CAPTURE RING |
| 0200-35324 |
SINGLE RING |
| 0200-35326 |
FOCUS RING DPS |
| 0200-35335 |
CAPTURE RING DPS |
| 0200-35389 |
SINGLE RING |
| 0200-35430 |
RING SINGLE CER 145MM JEIDA MAJOR FLAT DPS |
| 0200-35576 |
PUMPING LID ISOLATOR |
| 0200-35579 |
CHAMBER INSERT |
| 0200-35580 |
BUSING PIN |
| 0200-35595 |
OBS LINER LID |
| 0200-35611 |
LID.LINER SCERW |
| 0200-35623 |
INSERT RING SILICON MXP |
| 0200-356697 |
SI TOP RING |
| 0200-35702 |
EDGE RING |
| 0200-35785 |
RING CERAMIC WAFER LIFT |
| 0200-35842 |
C-RING |
| 0200-35843 |
TOP CERAMIC LINER |
| 0200-36105 |
CHAMBER INSERT |
| 0200-36373 |
LIFT PIN 149 DIA TRIANGLE |
| 0200-36415 |
PUMPING RING C-SHAPE |
| 0200-36417 |
PUMPING RING TOP |
| 0200-36418 |
PUMPING CHANNELCOVER |
| 0200-36524 |
LID. LINER |
| 0200-36609 |
LID ISOLATOR |
| 0200-36649 |
PLATE FINGER,LIFT RING |
| 0200-36666 |
ISOLATOR |
| 0200-36686 |
SINGLE RING |
| 0200-39140 |
RING FOCUS 195MM SNNF 1" DPS |
| 0200-39141 |
FOCUS RING DPS |
| 0200-39143 |
RING FOCUS 145MM JEIDA M/F CERAMIC |
| 0200-39274 |
BOTTOM LINER |
| 0200-39289 |
PUMPING LINER |
| 0200-39324 |
CHAMBER INSERT |
| 0200-39361 |
ISOLATOR PUMPING RING |
| 0200-40156 |
LIFT PIN CERAMIC LONG |
| 0200-50090 |
FOCUS RING |
| 0200-50107 |
SINGLE RING |
| 0200-50111 |
CLAMP RING |
| 0200-50112 |
COVER 7 |
| 0200-50113 |
A NUT COVER LID |
| 0200-50114 |
CERAMIC OUTER |