NOVELLUS

NOVELLUS Parts

NOVELLUS

Part Number Description
02-00085-00 ASSY, INDUCTOR,420UH 
02-054573-00 MOER RING, 1.25mm, 300mm
02-054573-00(S) CLASSIC MOER RING(S1-L)_REV
02-054573-00(U) MOER RING 2.4MM-14L
02-054573-00(U1) CLASSIC MORE RING(15L)
02-054573-00(U3) CLASSIC MOER RING(12L-1)
02-054573-00(U4) CLASSIC RING (MAX)
02-054573-00(U6) SUPER RING
02-054573-00(U7) CLASSIC RING 2mm
02-054573-00(U8) MOER RING 1.25mm(CAP)
02-054574-00(U2) HOLDER (U2)
02-054574-00(U4) CLASSIC RING 1.75 HOLDER - NRD
02-119726-00(U) FORK ASS'Y (SET)
02-282143-00 T-RAIL MOER HOLDER
02-282143-00_M HOLDER,WAFER,MOER RING_M
02-339691-00 ASSY,POT,PROBE TIP
02-347254-01 ASSY,PROBE,POTENTIOSTATIC,CELL1
02-347254-02 ASSY,PROBE,POTENTIOSTATIC,CELL2
02-347254-03 ASSY,PROBE,POTENTIOSTATIC,CELL3
02-385555-00 ASSY, EXCL RING FINGER, PKTD, EE ALTUS
02-385555-00 SAPPHIRE WHEEL
03-00295-00 ASSY,CABLE,ROT. SENSOR
03-00296-00 ASSY,CABLE,LFT/EXT SENSOR
03-00299-00 ASSY INDUCTOR
04-357414-00 KIT,PEM CHUCK,BUTTON AND HOLDERS,EXTREME
04-393379-00 PIN (SET)
04-705760-02 CERAMIC RING 6"
04-712209-02 SCREW,SHIELD
10-276800-00 TUBE,.75",10.625" AL,FINNED.C3VCTR
15-00043-02 ADJUST GAS PLATE
15-00126-00 STRAP,HEATER GND
15-00216-01 HOLDER, FILTER LL BACKFILL
15-00229-00 NUT,FEEDTHROUGH 1/2-2 OUNX.25
15-00401-00 SHAFT,SPINDLE
15-00418-00 SPACER,BEARING
15-00475-00 FEEDTHROUGH TOP PLATE
15-00479-00 GENEVA WHEEL
15-00480-00 GENEVA DRIVE
15-00483-00 SHAFT GUIDE RING
15-00484-00 BUSHING CERAMIC
15-00485-00 BRKT,150MM
15-00486-00 BRKT,125MM
15-00487-00 BRKT,100MM
15-00500-00 NUT,3/8-32 SS
15-00514-00 BSHG,ROT BEARING
15-00515-00 BSHG, BEARING
15-00516-00 BSHG,BRAKE
15-00520-00 BSHG, SEAL GUIDE
15-00529-00 BRKT, BRAKE
15-00532-00 WASHER, BRAKE
15-00534-00 FLNG,BRAKE
15-00547-00 SHAFT ARM
15-00549-00 SHAFT,FOREARM
15-00553-05 SHIM,HEATER .005
15-00553-10 SHIM,HEATER .010
15-00553-18 SHIM,HEATER .018
15-00553-25 SHIM,HEATER .025
15-00553-31 SHIM,HEATER .031
15-00554-05 SHIM,V .005
15-00554-10 SHIM,V .010
15-00554-18 SHIM,V .018
15-00554-25 SHIM,V .025
15-00554-31 SHIM,V .031
15-00558-01 SLEEVE HEATER LEAD 2.0
15-00558-02 SLEEVE HEATER LEAD 2.75
15-00567-00 TC TUBE
15-00589-00 MANIFOLD, 7 STATION
15-00653-00 CLAMP,HOUSING
15-00654-00 WASHER,FLANGE
15-00656-00 SHAFT,EXT
15-00660-00 HSG,BRG-EXT
15-00665-00 SHAFT,ROTATION
15-00666-00 BSHG,ROTATION
15-00680-00 TC SLEEVE
15-00684-00 CERAMIC TUBE
15-00685-00 FDTHRU,INNER
15-00686-00 WASHER,FT
15-00698-00 SCREW CAP
15-00699-01 SPINDLE FORK 7.65INCH
15-00699-02 SPINDLE FORK 8.35INCH
15-00699-03 SPINDLE FORK 8.35INCH
15-00699-04 SPINDLE FORK 7.65INCH
15-00700-00 BOTTOM PLATE(REV-1)
15-00701-00 FORK RETAINING BOTTOM PLATE 6"
15-00703-00 TOP PLATE 6"(ALL IN ONE)
15-00729-00 CLAMP,FLAT
15-00731-00 BUSHING KEYED
15-00742-00 TUBE CENTER
15-00835-00 PLATEFORM,LIFT PIN WCVD
15-00866-00 SPRING CERAMIC
15-00924-00 BAR CLAMP,HUB,EXCL OPTION
15-00934-02 INDEXER,WF,EXCL,OPTION,200MM
15-00951-00 CUP,SCREW COVER
15-00982-00 SHAFT,SPDL,WCVD RING LIFT
15-01059-00 BRKT,REAR,PLASTIC CASSETTE
15-01101-00 HUB,INDEXER
15-01122-00 BRKT,200MM PADDLE
15-01127-00 PADDLE - C2
15-01132-00 HOUSING,BEARING,PURGED
15-024587-00 SPACER,HEATER W/PIN HOLE
15-024611-00 PADDLE 200MM WITH DIMPLES
15-024881-00 SPINDLE AL HUB
15-024881-00 FORK,END CAP
15-028766-00 GUIDE RING
15-029308-00 MOER RING
15-032016-00 PIN CERAMIC INSERT
15-032185-00 PIN CENTER RING
15-032502-00 LIFT PIN
15-032503-00 RING INSULATOR
15-032777-00 MOER RING
15-032777-00 MOER RING 2.0MM
15-032939-00 MOER RING
15-032939-00 MOER RING 2.25MM
15-033946-00 WAFER PEC
15-033947-00 WAFER PEC
15-033949-00 WAFER PEC
15-034333-00 TUBE PROCESS INJECTOR
15-034847-00 HUB,UPPER INDEXER
15-034848-00 HUB,LOWER,INDEXER
15-034849-00 RETAINER,SEAL
15-034851-00 BUSHING,SPLIT
15-041083-00 GUARD RING 150MM(FLAT ZONE TYPE)
15-049740-00 MOER RING
15-050160-15 TUBE INJECTOR HI-PURITY 1.5"
15-050160-16 TUBE INJECTOR HI-PURITY 1.625"
15-050160-18 TUBE INJECTOR HI-PURITY 1.75"
15-050160-19 TUBE INJECTOR HI-PURITY 1.87"
15-050160-20 TUBE INJECTOR HI-PURITY 2"
15-050160-25 TUBE INJECTOR HI-PURITY 2.5"
15-050160-30 TUBE INJECTOR HI-PURITY 3"
15-050160-35 TUBE INJECTOR HI-PURITY 3.5"
15-050160-41 TUBE INJECTOR HI-PURITY 4.13"
15-051711-15 TUBE INJECTOR HI-PURITY 1.5"
15-051711-25 TUBE INJECTOR HI-PURITY 2.5"
15-051711-30 TUBE INJECTOR HI-PURITY 3"
15-052375-00 FINGER CERAMIC XFR PLT
15-052619-00 TONG RING LIFT 200mm
15-052620-00 RETAINER,TONG,R-KIFT
15-052648-00 VECTOR ROBOT PADDLE
15-053271-02 TUBE CLEAN INJECTOR 300mm
15-053394-01 SPINDLE FORK 7.65"
15-053394-02 SPINDLE FORK 8.35"
15-053394-03 SPINDLE FORK 8.35"
15-054296-00 PIN .183OD X 319LG SAPPHIRE
15-054296-00 SAPPHIRE PIN
15-054434-01 MOER RING 3.0MM
15-054434-02 MOER RING
15-054434-02 MOER RING 2.75MM
15-054434-03 MOER RING 2.5MM
15-054583-00 CLIP RETAINING MOER HOLDER
15-054586-00 INSERT NUT
15-054595-00 SCRW 1/4-28 CERAMIC GUIDE
15-054800-00 SPRING CERAMIC 300mm
15-055546-03 PIN WAFER LIFT
15-055546-04 PIN WAFER LIFT
15-055720-00 SPACER,BUSHING
15-055721-00 BUSHING,SPLIT
15-100263-00 PADDLE 200mm
15-100415-00 RING EXCLUSION 0.75 O/H
15-100603-00 INSULATOR GAS DIST
15-100609-00 SCRW 1/4-28 CERAMIC PLAIN
15-100641-00 WINDOW,SAPPHIRE
15-100641-00
15-101482-00 UPPER PLATE (6L-2)
15-101482-00 FORK,TOPPLATE A,ANTIDEFLECT,SEQ
15-101482-00(U3) PLATE(8L)
15-101482-01 FORK TOP PLATE B
15-101482-01 FORK,TOPPLATE ,ANTIDEFLECT,SEQ
15-101482-02 FORK,TOPPLATE C,ANTIDEFLECT,SEQ
15-10324-00 BOTTOM PIN
15-103651-00 RING, GUIDE, C'BORE, 200MM
15-10489-00 CLAMP,CHAMBER VIEWPORT
15-105508-00 RING EXCL 2.25 O/H 300MM
15-108174-00 CUP,SCREW COVER
15-108307-00 CLAMP,RF STRAP
15-109921-00 COVER ESC
15-11263-02 WINDOW,VIEWPORT
15-112704-00 HOLDER,LIFT PIN
15-112705-00 CAP,RETAINER,LIFT PIN HOLDER
15-113064-00 NOZZLE,INJECTOR,SPEED/SPEED-S
15-11507-00 MOER RING 1.5MM
15-11606-00 INSULATOR GAD DISTRIBUTION
15-116792-00 TUBE,RF BREAK, 0.25OD
15-119067-00 MODIFIED,CUP,END EFFECTOR
15-120150-01 TUBE INJECTOR HI-PURITY 2"
15-120150-02 TUBE INJECTOR HI-PURITY 0.75"
15-120150-03 TUBE INJECTOR HI-PURITY 0.5"
15-120150-04 TUBE INJECTOR HI-PURITY 1"
15-120150-05 TUBE INJECTOR HI-PURITY 4"
15-120150-06 TUBE INJECTOR HI-PURITY 1.5"
15-120150-07 TUBE INJECTOR HI-PURITY 3"
15-120150-08 TUBE INJECTOR HI-PURITY 1.25"
15-120150-09 TUBE INJECTOR HI-PURITY 1.75"
15-120150-10 TUBE INJECTOR HI-PURITY 2.25"
15-120150-11 TUBE INJECTOR HI-PURITY 2.5"
15-120150-12 TUBE INJECTOR HI-PURITY 2.75"
15-120150-13 TUBE INJECTOR HI-PURITY 3.25"
15-120150-14
15-120150-15 TUBE INJECTOR HI-PURITY 3.75"
15-120150-16 TUBE INJECTOR HI-PURITY 4.25"
15-120150-17 TUBE INJECTOR HI-PURITY 4.5"
15-120150-18 TUBE INJECTOR HI-PURITY 4.75"
15-120150-19 TUBE INJECTOR HI-PURITY 5"
15-120150-20 TUBE INJECTOR HI-PURITY 5.25"
15-120150-21 TUBE INJECTOR HI-PURITY 5.5"
15-120150-22 TUBE INJECTOR HI-PURITY 5.75"
15-120150-23 TUBE INJECTOR HI-PURITY 6"
15-122086-00 COVER ESC
15-122178-00 VECTOR CARRIER RING
15-127251-01 COVER PLATE
15-149982-00 GUARD DISK LTM
15-150002-00 RING GROUND LTM
15-151243-00 TUBE THICK CLEAN INJECTOR
15-156718-00 MOER RING 1.0MM
15-158185-00 NANO CLEAN TUBE
15-161585-00 NOZZLE,INJECTOR,SPLIT,SPD-S
15-169666-00 INJECTOR TUBE LONG
15-169667-00 INJECTOR TUBE SHORT
15-173189-00 CUP,VAC,300MM ANNL,VESPEL
15-250453-00 SAPPHIRE PIN
15-250878-00 SCREW MOER ALUMINA 10-32X 200IN
15-251538-00 PIN
15-251847-00 INJECTOR TUBE CLOSE END
15-256358-00 SAPPHIRE WHEEL
15-256661-00 RING GUARD
15-256677-00 END EFFECTOR
15-257942-15 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-16 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-17 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-18 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-19 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-20 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-21 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-22 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-23 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-24 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-25 NOZZLE,INJ.VARIABLE SiH4 DIA
15-257942-26 NOZZLE,INJ.VARIABLE SiH4 DIA
15-258837-00 CLAMP,RF STRAP,3 HOLE,ALUMINUM
15-264609-00 LIFT PIN
15-267616-00 CUP,TOP,KNIEF EDGE,TAPERED
15-269129-00 CUP,300MM,KNIEF EDGE,BOTTOM,X40
15-278968-00 INJECTOR TUBE STAR INSERT 1.375
15-280354-00 RING GUARD EXT CATHODE LTM
15-280992-00 GUARD DISK LTM EXT CATHODE
15-282056-00 FTG SH RF ISOLTR
15-282824-00 CUP,TOP,1MM EE
15-288460-00 SAPPHIRE PIN
15-293564-00 BLADE LOAD/UNLOAD
15-295407-05 INSERT,HRVA EXTREME CELL,11.47 X 14
15-303364-00 C3 SPACER DISKPEDESTAL
15-325002-00 CARRIER RING
15-327151-00 CUP,VACUUM,300MM ANNEAL,VESPEL
15-340043-00 CUP,BOTTOM,APC,1MM
15-357896-00 CUP,BOTTOM,APC,1.75MM,PAI
15-357957-00 CUP,BOTTOM,APC,1MM,PAI
15-369012-00 PIN 3.0
15-372361-00 GASKET,SAC MEMBRANE SEAL,IRISCELL
15-372362-00 GASKET,DC MEMBRANE SEAL,IRISCELL
15-375743-00 MEMBRANE,PLATING CELL,SAC
15-406361-00 MEMBRANE,PES,NI,SBR-3D
15-412730-00 SPRING,SNUBBER,KEYHOLE,APC
15-428049-00 MEMBRANE,PES,IA,SABRE 3D
16-137450-00 LOUVER TURBO SPD ALL WELDMENT
16-151753-00 ACT TOPHAT,300 ANNEAL WLDMENT
16-385621-00 PROBE,POT,IRISCELL
17-00094-00 STRAP,RF
17-00094-01 STRAP,RF
17-00148-00 SPRING,FORK
17-00175-00 CLAMP,CERAMIC FORK FIXTURE
17-032018-00 SCREEN,RF SHIELD,ETCHED
17-101596-00 RETAINER,FORK,SEQ
17-103987-00 STRAP,RF
17-318098-00 CONTACT,1MM,APC,N6 300MM
20-286471-00 SPIRAWAVE,NESTED
20-370752-00 SPIRAWAVE,NESTED
21-100610-00 WHEEL, CENTERING, .3244 0D x .101T, ROLLER
21-138893-00 WASHER,WAVY,.362OD,INCONELX750
22-054580-00 BALL
22-287767-00 SEAL,CONE,APC,MCD